Invention Grant
- Patent Title: Resist pattern and reflow technology
- Patent Title (中): 抗蚀图案和回流技术
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Application No.: US12081098Application Date: 2008-04-10
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Publication No.: US07846623B2Publication Date: 2010-12-07
- Inventor: Yoshiki Hishiro
- Applicant: Yoshiki Hishiro
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Dickstein Shapiro LLP
- Main IPC: B32B5/14
- IPC: B32B5/14

Abstract:
A reflow stabilizing solution for treating photoresist patterns and a reflow technology are disclosed. The reflow stabilizing solution comprises a polymer and is applied after the photoresist material has been developed and patterned. By treating the photoresist with the reflow stabilizing solution after resist patterning and further subjecting the reflow stabilizing solution to a heat treatment, the non-volatile polymer remains in between adjacent resist patterns and acts as a stopper to the reflowed photoresist. In this manner, the non-volatile polymer provides structural and mechanical support for the reflowed resist, preventing resist collapse at high temperatures and allowing the formation of reflowed resist structures having line width dimensions in the submicron range.
Public/Granted literature
- US20080261125A1 Resist pattern and reflow technology Public/Granted day:2008-10-23
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