Invention Grant
US07846638B2 Composition for forming anti-reflective coating for use in lithography
有权
用于形成用于光刻的抗反射涂层的组合物
- Patent Title: Composition for forming anti-reflective coating for use in lithography
- Patent Title (中): 用于形成用于光刻的抗反射涂层的组合物
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Application No.: US11979448Application Date: 2007-11-02
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Publication No.: US07846638B2Publication Date: 2010-12-07
- Inventor: Takahiro Kishioka , Ken-ichi Mizusawa , Tomoyuki Enomoto , Rikimaru Sakamoto , Keisuke Nakayama , Yasuo Kawamura
- Applicant: Takahiro Kishioka , Ken-ichi Mizusawa , Tomoyuki Enomoto , Rikimaru Sakamoto , Keisuke Nakayama , Yasuo Kawamura
- Applicant Address: JP Tokyo
- Assignee: Nissan Chemical Industries, Ltd.
- Current Assignee: Nissan Chemical Industries, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2002-295777 20021009; JP2003-126886 20030502
- Main IPC: G03C1/825
- IPC: G03C1/825 ; G03F7/09 ; G03F7/20 ; G03F7/30

Abstract:
There is provided a composition for forming anti-reflective coating for anti-reflective coating that has a good absorption of light at a wavelength utilized for manufacturing a semiconductor device, that exerts a high protection effect against light reflection, that has a high dry etching rate compared with the photoresist layer. Concretely, the composition for forming anti-reflective coating contains a triazine trione compound, oligomer compound or polymer compound having hydroxyalkyl structure as substituent on nitrogen atom.
Public/Granted literature
- US20080206680A1 Composition for forming anti-reflective coating for use in lithography Public/Granted day:2008-08-28
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