Invention Grant
- Patent Title: Method of fabricating nano-wire array
- Patent Title (中): 制造纳米线阵列的方法
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Application No.: US11927881Application Date: 2007-10-30
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Publication No.: US07846786B2Publication Date: 2010-12-07
- Inventor: Hong Yeol Lee , Seung Eon Moon , Eun Kyoung Kim , Jong Hyurk Park , Kang Ho Park , Jong Dae Kim , Gyu Tae Kim , Jae Woo Lee , Hye Yeon Ryu , Jung Hwan Huh
- Applicant: Hong Yeol Lee , Seung Eon Moon , Eun Kyoung Kim , Jong Hyurk Park , Kang Ho Park , Jong Dae Kim , Gyu Tae Kim , Jae Woo Lee , Hye Yeon Ryu , Jung Hwan Huh
- Applicant Address: KR Seoul KR Daejeon
- Assignee: Korea University Industrial & Academic Collaboration Foundation,Electronics and Telecommunications Research Institute
- Current Assignee: Korea University Industrial & Academic Collaboration Foundation,Electronics and Telecommunications Research Institute
- Current Assignee Address: KR Seoul KR Daejeon
- Agency: Rabin & Berdo, P.C.
- Priority: KR10-2006-0122349 20061205; KR10-2007-0061440 20070622
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/16 ; H01L29/06 ; H01L27/088

Abstract:
Provided is a method of fabricating a nano-wire array, including the steps of: depositing a nano-wire solution, which contains nano-wires, on a substrate; forming a first etch region in a stripe shape on the substrate and then patterning the nano-wires; forming drain and source electrode lines parallel to each other with the patterned nano-wires interposed therebetween; forming a plurality of drain electrodes which have one end connected to the drain electrode line and contact at least one of the nano-wires, and forming a plurality of source electrodes, which have one end connected to the source electrode line and contact the nano-wires that contact the drain electrodes; forming a second etch region between pairs of the drain and source electrodes so as to prevent electrical contacts between the pairs of the drain and source electrodes; forming an insulating layer on the substrate; and forming a gate electrode between the drain and source electrodes contacting the nano-wires on the insulating layer. Accordingly, even in an unparallel structure of nano-wires to electrode lines, a large scale nano-wire array is practicable and applicable to an integrated circuit or display unit with nano-wire alignment difficulty, as well as to device applications using flexible substrates.
Public/Granted literature
- US20080233675A1 METHOD OF FABRICATING NANO-WIRE ARRAY Public/Granted day:2008-09-25
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