Invention Grant
- Patent Title: Method of manufacturing transistor and method of manufacturing organic electroluminescence display using the same
- Patent Title (中): 制造晶体管的方法及使用其制造有机电致发光显示器的方法
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Application No.: US12275578Application Date: 2008-11-21
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Publication No.: US07846787B2Publication Date: 2010-12-07
- Inventor: Kyu-Sik Cho , Joon-Hoo Choi
- Applicant: Kyu-Sik Cho , Joon-Hoo Choi
- Applicant Address: KR Suwon-Si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-Si
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2008-0063597 20080701
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/84 ; H01L27/14 ; H01L29/04 ; H01L29/15 ; H01L31/036

Abstract:
A method of manufacturing a transistor and a method of manufacturing an organic electroluminescence display are disclosed. When an amorphous silicon layer is crystallized, a silicon oxide layer formed on a polysilicon layer is subsequently patterned. Impurity ions are implanted into first and second regions of the amorphous silicon layer to form first and second doped regions. The silicon oxide layer is patterned so that the silicon oxide layer may be removed from an ohmic contact region of the polysilicon layer, and covers only a channel region of the polysilicon layer.
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