Invention Grant
- Patent Title: Method for fabricating saddle type fin transistor
- Patent Title (中): 鞍形鳍式晶体管的制造方法
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Application No.: US12574634Application Date: 2009-10-06
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Publication No.: US07846844B2Publication Date: 2010-12-07
- Inventor: Kwang-Ok Kim
- Applicant: Kwang-Ok Kim
- Applicant Address: KR Kyoungki-do
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Kyoungki-do
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- Priority: KR2005-0133846 20051229
- Main IPC: H01L21/311
- IPC: H01L21/311

Abstract:
A method for fabricating a saddle type fin transistor includes: preparing a substrate where a device isolation structure is already formed; forming a hard mask pattern over the substrate, the hard mask pattern including a coating layer obtained through a coating method; and performing an etching process using the hard mask pattern as an etch mask to form a saddle type fin. The hard mask pattern may be formed in a stack structure including an amorphous carbon layer and the coating layer.
Public/Granted literature
- US20100055616A1 METHOD FOR FABRICATING SADDLE TYPE FIN TRANSISTOR Public/Granted day:2010-03-04
Information query
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