Invention Grant
US07847310B2 Migration enhanced epitaxy fabrication of active regions having quantum wells 有权
迁移增强了具有量子阱的有源区的外延生长

Migration enhanced epitaxy fabrication of active regions having quantum wells
Abstract:
Semiconductor lasers, such as VCSELs having active regions with flattening layers associated with nitrogen-containing quantum wells are disclosed. MEE (Migration Enhanced Epitaxy) is used to form a flattening layer upon which a quantum well is formed and thereby enhance smoothness of quantum well interfaces and to achieve narrowing of the spectrum of light emitted from nitrogen containing quantum wells. A cap layer is also formed over the quantum well.
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