Invention Grant
- Patent Title: Dense chevron non-planar field effect transistors and method
- Patent Title (中): 密集V形非平面场效应晶体管及方法
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Application No.: US11939574Application Date: 2007-11-14
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Publication No.: US07847320B2Publication Date: 2010-12-07
- Inventor: Brent A. Anderson , Andres Bryant , Edward J. Nowak
- Applicant: Brent A. Anderson , Andres Bryant , Edward J. Nowak
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Gibb I.P. Law Firm, LLC
- Agent Richard M. Kotulak, Esq.
- Main IPC: H01L29/80
- IPC: H01L29/80

Abstract:
Disclosed are embodiments of semiconductor structure and a method of forming the semiconductor structure that simultaneously maximizes device density and avoids contacted-gate pitch and fin pitch mismatch, when multiple parallel angled fins are formed within a limited area on a substrate and then traversed by multiple parallel gates (e.g., in the case of stacked, chevron-configured, CMOS devices). This is accomplished by using, not a minimum lithographic fin pitch, but rather by using a fin pitch that is calculated as a function of a pre-selected contacted-gate pitch, a pre-selected fin angle and a pre-selected periodic pattern for positioning the fins relative to the gates within the limited area. Thus, the disclosed structure and method allow for the conversion of a semiconductor product design layout with multiple, stacked, planar FETs in a given area into a semiconductor product design layout with multiple, stacked, chevron-configured, non-planar FETs in the same area.
Public/Granted literature
- US20090121291A1 DENSE CHEVRON NON-PLANAR FIELD EFFECT TRANSISTORS AND METHOD Public/Granted day:2009-05-14
Information query
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