Invention Grant
- Patent Title: Electrical device and method
- Patent Title (中): 电气装置和方法
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Application No.: US11941625Application Date: 2007-11-16
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Publication No.: US07847387B2Publication Date: 2010-12-07
- Inventor: Thomas Kilger , Horst Theuss
- Applicant: Thomas Kilger , Horst Theuss
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Dicke, Billig & Czaja, PLLC
- Main IPC: H01L23/02
- IPC: H01L23/02
Abstract:
An electrical device and method is disclosed. One embodiment provides a substrate, a sensor chip disposed completely above a plane section of a surface of the substrate. A structurally homogeneous material layer is disposed above the substrate and the sensor chip. A cavity is formed between the substrate and the material layer. The sensor chip is disposed inside the cavity.
Public/Granted literature
- US20090127638A1 ELECTRICAL DEVICE AND METHOD Public/Granted day:2009-05-21
Information query
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