Invention Grant
- Patent Title: Alignment system for optical lithography
- Patent Title (中): 光刻对准系统
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Application No.: US12240781Application Date: 2008-09-29
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Publication No.: US07847938B2Publication Date: 2010-12-07
- Inventor: Hans Dohse
- Applicant: Hans Dohse
- Applicant Address: US CA San Jose
- Assignee: Maskless Lithography, Inc.
- Current Assignee: Maskless Lithography, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Schneck & Schneck
- Agent Thomas Schneck
- Main IPC: G01B11/00
- IPC: G01B11/00

Abstract:
An alignment system for optical lithography uses cameras fixed to a movable stage and to a lithography unit to view unique microscopic non-uniformities that are inherent to the surface of a work piece, e.g., metal or ceramic microcrystalline grains, for position referencing. Stage cameras image two sites on the work piece through windows in the stage to establish original position templates. After the work piece has been repositioned, e.g., reversed topside-down, the same two sites are again viewed and template matching establishes the transformed coordinates of the work piece, e.g. by a lithography unit camera under which the stage moves to approximate site locations. Two corner cameras can serve as a coarse positioning mechanism. The alignment system is particular useful for backside alignment in printed circuit board lithography.
Public/Granted literature
- US20090086207A1 ALIGNMENT SYSTEM FOR OPTICAL LITHOGRAPHY Public/Granted day:2009-04-02
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