Invention Grant
- Patent Title: Field-effect transistor
- Patent Title (中): 场效应晶体管
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Application No.: US12089907Application Date: 2006-11-01
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Publication No.: US07851792B2Publication Date: 2010-12-14
- Inventor: Toshiaki Aiba , Masafumi Sano , Nobuyuki Kaji
- Applicant: Toshiaki Aiba , Masafumi Sano , Nobuyuki Kaji
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2005-323689 20051108; JP2006-283893 20061018
- International Application: PCT/JP2006/322327 WO 20061101
- International Announcement: WO2007/055256 WO 20070518
- Main IPC: H01L29/786
- IPC: H01L29/786

Abstract:
Provided is a field-effect transistor including an active layer and a gate insulating film, wherein the active layer includes an amorphous oxide layer containing an amorphous region and a crystalline region, and the crystalline region is in the vicinity of or in contact with an interface between the amorphous oxide layer and the gate insulating film.
Public/Granted literature
- US20090272970A1 FIELD-EFFECT TRANSISTOR Public/Granted day:2009-11-05
Information query
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