Invention Grant
- Patent Title: High-sensitivity image sensor and fabrication method thereof
- Patent Title (中): 高灵敏度图像传感器及其制造方法
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Application No.: US11952365Application Date: 2007-12-07
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Publication No.: US07851839B2Publication Date: 2010-12-14
- Inventor: Hoon Kim
- Applicant: Hoon Kim
- Applicant Address: KR Gyeonggi-Do
- Assignee: Korea Electronics Technology Institute
- Current Assignee: Korea Electronics Technology Institute
- Current Assignee Address: KR Gyeonggi-Do
- Agency: Greenblum & Bernstein P.L.C.
- Main IPC: H01L31/062
- IPC: H01L31/062 ; H01L31/113 ; H01L21/00 ; H01L21/425

Abstract:
A method of fabricating a high-sensitivity image sensor and the same are disclosed. The disclosed method comprises: etching predetermined regions of active silicon and a buried oxide layer of a SOI substrate by using a mask to expose an N-type silicon substrate; implanting P-type ions into the exposed N-type silicon substrate to form P-type regions; forming a gate oxide layer and a gate electrode on the middle part of the active silicon not etched while the active silicon is etched to expose the N-type silicon substrate; forming a P-type gate electrode, and P-type source and drain regions by implanting P-type ions into the active silicon and the gate electrode above the buried oxide layer; and constructing a connection part to connect the P-type regions to the gate electrode. The disclosed high-sensitivity sensor comprises: a photodiode region having a PN junction between an N-type silicon substrate and a P-type region thereon; a monocrystalline silicon region from a SOI substrate in which source and drain regions, and a channel are placed, having a distance to the photodiode region; a gate oxide layer and a gate electrode on the silicon region; and a connection part connecting the P-type region of the photodiode to the gate electrode.
Public/Granted literature
- US20080073678A1 HIGH-SENSITIVITY IMAGE SENSOR AND FABRICATION METHOD THEREOF Public/Granted day:2008-03-27
Information query
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