An RF power generator (10) for an induction coil (26) for exciting an inductively coupled plasma in a torch (27) for spectrometry. The generator (10) comprises a switching circuit (12) for alternately switching ON and OFF solid state switching devices (20) via gate drive voltages (22) for supplying RF power into a resonant load circuit (16) comprising the induction coil (26) and parallel connected capacitance (25). The gate drive circuits (24) for each solid state switching device (20) each include a portion (30) that is mutually inductively coupled with leads of the induction coil (26) to provide the gate drive voltages (22). The circuit allows for reduced componentry and therefore a relatively inexpensive RF power generator for exciting and sustaining an inductively coupled plasma for spectrometry.