Invention Grant
US07854015B2 Method for measuring the force of interaction in a scanning probe microscope
有权
在扫描探针显微镜中测量相互作用力的方法
- Patent Title: Method for measuring the force of interaction in a scanning probe microscope
- Patent Title (中): 在扫描探针显微镜中测量相互作用力的方法
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Application No.: US12277158Application Date: 2008-11-24
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Publication No.: US07854015B2Publication Date: 2010-12-14
- Inventor: Storrs Hoen
- Applicant: Storrs Hoen
- Applicant Address: US CA Santa Clara
- Assignee: Agilent Technologies, Inc.
- Current Assignee: Agilent Technologies, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: G01N13/16
- IPC: G01N13/16 ; G01Q60/22 ; G01Q60/24

Abstract:
A scanning probe microscope and method for operating the same are disclosed. The microscope includes a probe mount for attaching a probe, an electro-mechanical actuator, a probe position signal generator, an impulse signal generator and a servo. A probe tip is mounted on a first end of a cantilever arm, a second end of the cantilever arm being mounted on a mechanical vibrator that causes the second end to vibrate in response to a drive signal. The probe position signal generator generates a position signal indicative of a position of the probe relative to the second end of the cantilever arm. The impulse signal generator measures a quantity related to an impulse imparted to the probe tip by the interaction between the tip and the local characteristics of the sample. The servo operates the electro-mechanical actuator so as to maintain the measured quantity at a predetermined value.
Public/Granted literature
- US20100132078A1 Method for Measuring the Force of Interaction in a Scanning Probe Microscope Public/Granted day:2010-05-27
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