Invention Grant
- Patent Title: Method of forming organic thin film and method of manufacturing semiconductor device using the same
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Application No.: US12382958Application Date: 2009-03-27
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Publication No.: US07855121B2Publication Date: 2010-12-21
- Inventor: Do Hwan Kim , Sangyoon Lee , Hector Alejandro Becerril Garcia , Mark Roberts , Zhenan Bao , Zihong Liu
- Applicant: Do Hwan Kim , Sangyoon Lee , Hector Alejandro Becerril Garcia , Mark Roberts , Zhenan Bao , Zihong Liu
- Applicant Address: KR Gyeonggi-do US CA Palo Alto
- Assignee: Samsung Electronics Co., Ltd.,The Board of Trustees of the Laland Stanford Junior University
- Current Assignee: Samsung Electronics Co., Ltd.,The Board of Trustees of the Laland Stanford Junior University
- Current Assignee Address: KR Gyeonggi-do US CA Palo Alto
- Agency: Harness, Dickey & Pierce, P.L.C.
- Main IPC: H01L21/20
- IPC: H01L21/20

Abstract:
Provided are a method of forming an organic semiconductor thin film and a method of manufacturing a semiconductor device using the. According to example embodiments, a method of forming an organic semiconductor thin film at least may include exposing a lower substrate coated with an organic semiconductor solution using a method of generating a shearing stress to the portion of the lower substrate coated with the organic semiconductor solution. A guide structure may be formed adjacent to the organic semiconductor solution.
Public/Granted literature
- US20100248421A1 Method of forming organic thin film and method of manufacturing semiconductor device using the same Public/Granted day:2010-09-30
Information query
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