Invention Grant
- Patent Title: Extendable electrode for gas discharge laser
- Patent Title (中): 气体放电激光可扩展电极
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Application No.: US11787463Application Date: 2007-04-16
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Publication No.: US07856044B2Publication Date: 2010-12-21
- Inventor: Richard L. Sandstrom , Tae (Mark) H. Chung , Richard C. Ujazdowski
- Applicant: Richard L. Sandstrom , Tae (Mark) H. Chung , Richard C. Ujazdowski
- Applicant Address: US CA San Diego
- Assignee: Cymer, Inc.
- Current Assignee: Cymer, Inc.
- Current Assignee Address: US CA San Diego
- Agent Matthew K. Hillman
- Main IPC: H01S3/097
- IPC: H01S3/097

Abstract:
Disclosed herein are systems and methods for extending one or both of the discharge electrodes in a transverse discharge gas laser chamber in which one or both the electrodes are subject to a dimensional change due to erosion. Electrode extension can be performed to increase the chamber life, increase laser performance over the life of the chamber, or both. Operationally, the inter-electrode spacing may be adjusted to maintain a specific target gap distance between the electrodes or to optimize a specific parameter of the laser output beam such as bandwidth, pulse-to-pulse energy stability, beam size, etc.
Public/Granted literature
- US20070253459A1 Extendable electrode for gas discharge laser Public/Granted day:2007-11-01
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