Invention Grant
US07856332B2 Real time system for monitoring the commonality, sensitivity, and repeatability of test probes 失效
用于监测测试探针的通用性,灵敏度和可重复性的实时系统

Real time system for monitoring the commonality, sensitivity, and repeatability of test probes
Abstract:
A system and a method for effectively determining the measurement sensitivity, repeatability, and probe commonality to assist a test engineer determine if the tester meets the specified resolution at every test. A statistical measurement of inherent tester specifications are provided with the added accumulation of the probe contact resistance during the probing process. It further provides a feedback to the test probe card noise level while testing is in progress. Moreover, the system and the method determine the test probing integrity in-situ when testing integrated circuit chips or wafers, dynamically detecting probing errors, and modifying data associated with defective test probes.
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