Invention Grant
US07856332B2 Real time system for monitoring the commonality, sensitivity, and repeatability of test probes
失效
用于监测测试探针的通用性,灵敏度和可重复性的实时系统
- Patent Title: Real time system for monitoring the commonality, sensitivity, and repeatability of test probes
- Patent Title (中): 用于监测测试探针的通用性,灵敏度和可重复性的实时系统
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Application No.: US11950123Application Date: 2007-12-04
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Publication No.: US07856332B2Publication Date: 2010-12-21
- Inventor: Muthukumarasamy Karthikeyan , Louis V. Medina , Yunsheng Song , Tso-Hui Ting , Ping-Chuan Wang
- Applicant: Muthukumarasamy Karthikeyan , Louis V. Medina , Yunsheng Song , Tso-Hui Ting , Ping-Chuan Wang
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent H. Daniel Schnurmann
- Main IPC: G01R31/02
- IPC: G01R31/02 ; G01R31/00 ; G06F19/00 ; G06F17/40

Abstract:
A system and a method for effectively determining the measurement sensitivity, repeatability, and probe commonality to assist a test engineer determine if the tester meets the specified resolution at every test. A statistical measurement of inherent tester specifications are provided with the added accumulation of the probe contact resistance during the probing process. It further provides a feedback to the test probe card noise level while testing is in progress. Moreover, the system and the method determine the test probing integrity in-situ when testing integrated circuit chips or wafers, dynamically detecting probing errors, and modifying data associated with defective test probes.
Public/Granted literature
- US20090143999A1 REAL TIME SYSTEM FOR MONITORING THE COMMONALITY, SENSITIVITY, AND REPEATABILITY OF TEST PROBES Public/Granted day:2009-06-04
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