Invention Grant
- Patent Title: Interferometric method for improving the resolution of a lithographic system
- Patent Title (中): 用于提高光刻系统分辨率的干涉测量方法
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Application No.: US11763725Application Date: 2007-06-15
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Publication No.: US07859646B2Publication Date: 2010-12-28
- Inventor: Sean J. Bentley
- Applicant: Sean J. Bentley
- Applicant Address: US NY Garden City
- Assignee: Adelphi University
- Current Assignee: Adelphi University
- Current Assignee Address: US NY Garden City
- Agency: Leason Ellis LLP
- Main IPC: G03B27/54
- IPC: G03B27/54

Abstract:
According to one exemplary embodiment of the present invention, a method for writing an arbitrary, two-dimensional pattern using interferometric lithography and classical techniques includes the steps of: (1) creating a pixel array defined by a number of pixels having specific coordinates; (2) mapping pixel information based on the desired pattern, the pixel information including a list of which pixels are activated to define the desired two-dimensional pattern; (3) controlling a relative strength of each pixel for indicating a feature height of a portion of the desired two-dimensional pattern; and (4) controlling a degree that one pixel is shifted in an x-direction and a y-direction relative to original coordinates of the pixel in order to define the desired two-dimensional pattern pixel by pixel.
Public/Granted literature
- US20080174847A1 INTERFEROMETRIC METHOD FOR IMPROVING THE RESOLUTION OF A LITHOGRAPHIC SYSTEM Public/Granted day:2008-07-24
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