Invention Grant
US07859646B2 Interferometric method for improving the resolution of a lithographic system 有权
用于提高光刻系统分辨率的干涉测量方法

  • Patent Title: Interferometric method for improving the resolution of a lithographic system
  • Patent Title (中): 用于提高光刻系统分辨率的干涉测量方法
  • Application No.: US11763725
    Application Date: 2007-06-15
  • Publication No.: US07859646B2
    Publication Date: 2010-12-28
  • Inventor: Sean J. Bentley
  • Applicant: Sean J. Bentley
  • Applicant Address: US NY Garden City
  • Assignee: Adelphi University
  • Current Assignee: Adelphi University
  • Current Assignee Address: US NY Garden City
  • Agency: Leason Ellis LLP
  • Main IPC: G03B27/54
  • IPC: G03B27/54
Interferometric method for improving the resolution of a lithographic system
Abstract:
According to one exemplary embodiment of the present invention, a method for writing an arbitrary, two-dimensional pattern using interferometric lithography and classical techniques includes the steps of: (1) creating a pixel array defined by a number of pixels having specific coordinates; (2) mapping pixel information based on the desired pattern, the pixel information including a list of which pixels are activated to define the desired two-dimensional pattern; (3) controlling a relative strength of each pixel for indicating a feature height of a portion of the desired two-dimensional pattern; and (4) controlling a degree that one pixel is shifted in an x-direction and a y-direction relative to original coordinates of the pixel in order to define the desired two-dimensional pattern pixel by pixel.
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