Invention Grant
- Patent Title: Wafer center finding with charge-coupled devices
- Patent Title (中): 晶圆中心寻找与电荷耦合器件
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Application No.: US12032489Application Date: 2008-02-15
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Publication No.: US07859685B2Publication Date: 2010-12-28
- Inventor: Paul E. Fogel
- Applicant: Paul E. Fogel
- Agency: Perman & Green, LLP
- Agent Richard Pickreign
- Main IPC: G01B11/14
- IPC: G01B11/14
Abstract:
A device having a robotic arm within a robot chamber. The robotic arm includes an end effector adapted to handle a wafer. A linear array of charge-coupled devices are provided within the interior of the robot chamber, the linear array positioned to acquire image data from a measurement volume in one or more predetermined locations within the robot chamber.
Public/Granted literature
- US20080231866A1 WAFER CENTER FINDING WITH CHARGE-COUPLED DEVICES Public/Granted day:2008-09-25
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