Invention Grant
- Patent Title: Semiconductor storage device and method of manufacturing the same
- Patent Title (中): 半导体存储装置及其制造方法
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Application No.: US11498817Application Date: 2006-08-04
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Publication No.: US07859905B2Publication Date: 2010-12-28
- Inventor: Tetsuji Togami
- Applicant: Tetsuji Togami
- Applicant Address: JP Kanagawa
- Assignee: Renesas Electronics Corporation
- Current Assignee: Renesas Electronics Corporation
- Current Assignee Address: JP Kanagawa
- Agency: Sughrue Mion, PLLC
- Priority: JP2005-237235 20050818
- Main IPC: G11C11/34
- IPC: G11C11/34

Abstract:
A method of manufacturing a semiconductor storage device according to an embodiment of the present invention includes forming dummy cells 611, to 618 at a position adjacent to a reference cell 412, and implanting an impurity into the dummy cells 611, to 618 using a mask that covers the reference cell 412. Here, the process of implanting the impurity is carried out so that the impurity exudes out of the dummy cells 611, to 618 to the reference cell 412.
Public/Granted literature
- US20070041248A1 Semiconductor storage device and method of manufacturing the same Public/Granted day:2007-02-22
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