Invention Grant
US07861388B2 Method of manufacturing a cell driving type piezoelectric/electrostrictive actuator 失效
电池驱动型压电/电致伸缩致动器的制造方法

Method of manufacturing a cell driving type piezoelectric/electrostrictive actuator
Abstract:
A piezoelectric actuator capable of being driven with a high electric field intensity, obtaining a larger displacement and being high in electric conducting reliability of electrodes, and comprising: at least one cell defined by two side walls, a substrate and a ceiling wall; the two side walls being disposed on the substrate and being covered with the ceiling wall to define one cell, at least the two side walls comprising piezoelectric/electrostrictive devices, and the piezoelectric/electrostrictive devices being capable of changing a volume of the cell by displacement of the walls. Each of the piezoelectric/electrostrictive devices comprises a plurality of layered piezoelectric/electrostrictive bodies and electrodes which are alternately stacked, and end portions of the electrodes are embedded in the piezoelectric/electrostrictive bodies in at least the internal side of the cell.
Information query
Patent Agency Ranking
0/0