Invention Grant
US07861388B2 Method of manufacturing a cell driving type piezoelectric/electrostrictive actuator
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电池驱动型压电/电致伸缩致动器的制造方法
- Patent Title: Method of manufacturing a cell driving type piezoelectric/electrostrictive actuator
- Patent Title (中): 电池驱动型压电/电致伸缩致动器的制造方法
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Application No.: US11756758Application Date: 2007-06-01
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Publication No.: US07861388B2Publication Date: 2011-01-04
- Inventor: Yukihisa Takeuchi , Koji Kimura , Koichi Iwata
- Applicant: Yukihisa Takeuchi , Koji Kimura , Koichi Iwata
- Applicant Address: JP Nagoya
- Assignee: NGK Insulators, Ltd.
- Current Assignee: NGK Insulators, Ltd.
- Current Assignee Address: JP Nagoya
- Agency: Burr & Brown
- Priority: JP2003-155009 20030530; JP2004-154950 20040525
- Main IPC: H01L41/24
- IPC: H01L41/24 ; H04R17/10

Abstract:
A piezoelectric actuator capable of being driven with a high electric field intensity, obtaining a larger displacement and being high in electric conducting reliability of electrodes, and comprising: at least one cell defined by two side walls, a substrate and a ceiling wall; the two side walls being disposed on the substrate and being covered with the ceiling wall to define one cell, at least the two side walls comprising piezoelectric/electrostrictive devices, and the piezoelectric/electrostrictive devices being capable of changing a volume of the cell by displacement of the walls. Each of the piezoelectric/electrostrictive devices comprises a plurality of layered piezoelectric/electrostrictive bodies and electrodes which are alternately stacked, and end portions of the electrodes are embedded in the piezoelectric/electrostrictive bodies in at least the internal side of the cell.
Public/Granted literature
- US20070226975A1 CELL DRIVING TYPE PIEZOELECTRIC/ELECTROSTRICTIVE ACTUATOR AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2007-10-04
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