Invention Grant
- Patent Title: Electric potential difference detection method and scanning probe microscope
- Patent Title (中): 电位差检测方法和扫描探针显微镜
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Application No.: US11891109Application Date: 2007-08-09
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Publication No.: US07861577B2Publication Date: 2011-01-04
- Inventor: Masatsugu Shigeno , Akira Inoue
- Applicant: Masatsugu Shigeno , Akira Inoue
- Applicant Address: JP
- Assignee: Seiko Instruments Inc.
- Current Assignee: Seiko Instruments Inc.
- Current Assignee Address: JP
- Agency: Adams & Wilks
- Priority: JP2006-234565 20060830
- Main IPC: G01Q90/00
- IPC: G01Q90/00

Abstract:
An electric potential difference detection method detects an electric potential difference between a surface of a sample and a probe of a cantilever in a scanning probe microscope. An AC voltage having a frequency that is ½ of a resonance frequency of the cantilever is applied between the sample and the cantilever, and a magnitude of an amplitude of vibration of the cantilever is detected. On the basis of the detection, a determination is made as to whether an electric potential difference exists or does not exist between the surface of the sample and the cantilever probe. A determination that an electric potential difference between the surface of the sample and the cantilever probe does not exist is made in a case where the cantilever is resonating and the detected magnitude of the amplitude of vibration of the cantilever is greater than a predetermined magnitude.
Public/Granted literature
- US20080054928A1 Electric potential difference detection method and scanning probe microscope Public/Granted day:2008-03-06
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