Invention Grant
- Patent Title: Pressure sensing device for harsh environments
- Patent Title (中): 用于恶劣环境的压力传感装置
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Application No.: US12463504Application Date: 2009-05-11
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Publication No.: US07861595B2Publication Date: 2011-01-04
- Inventor: Gregory C. Brown , Thomas A. Larson
- Applicant: Gregory C. Brown , Thomas A. Larson
- Applicant Address: US NJ Morristown
- Assignee: Honeywell International Inc.
- Current Assignee: Honeywell International Inc.
- Current Assignee Address: US NJ Morristown
- Agency: Fogg & Powers LLC
- Main IPC: G01L7/00
- IPC: G01L7/00

Abstract:
A pressure sensing device comprises a substrate having an opening, a pressure sensor die electrically connected to the substrate, and a pedestal having an upper surface that extends through the opening in the substrate, with the upper surface affixed to the sensor die. The pedestal has a pressure port that extends from the upper surface to a bottom surface of the pedestal, with the pressure port containing a hermetic sealing tube therein. A hermetic sealing cover is affixed to the substrate over the sensor die, with the cover and the substrate containing a reference pressure for the sensor die. A media isolation component has a chamber filled with a fluid that transmits a pressure applied to the media isolation component to the pressure sensor die. A capillary tube is affixed within the pressure port of the pedestal and is in communication with the sealing tube. The capillary tube and the sealing tube provide fluid communication between the chamber of the media isolation component and the sensor die.
Public/Granted literature
- US20100281994A1 PRESSURE SENSING DEVICE FOR HARSH ENVIRONMENTS Public/Granted day:2010-11-11
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