Invention Grant
- Patent Title: Integrated circuit layout design
- Patent Title (中): 集成电路布局设计
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Application No.: US12356405Application Date: 2009-01-20
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Publication No.: US07862962B2Publication Date: 2011-01-04
- Inventor: Ming-Feng Shieh , Shinn-Sheng Yu , Anthony Yen , Shao-Ming Yu , Chang-Yun Chang , Jeff J. Xu , Clement Hsingjen Wann
- Applicant: Ming-Feng Shieh , Shinn-Sheng Yu , Anthony Yen , Shao-Ming Yu , Chang-Yun Chang , Jeff J. Xu , Clement Hsingjen Wann
- Applicant Address: TW Hsin-chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-chu
- Agency: Haynes and Boone, LLP
- Main IPC: G03F9/00
- IPC: G03F9/00 ; G03C5/00

Abstract:
Provided is a method including layout design of an integrated circuit. A first pattern is provided. The first pattern includes an array of dummy line features and a plurality of spacer elements abutting the dummy line features. A second pattern is provided. The second pattern defines an active region of an integrated circuit device. An edge spacer element of the active region is determined. A dummy line feature of the array of dummy line features is biased (e.g., increased in width), the dummy line feature is adjacent an edge spacer element.
Public/Granted literature
- US20100183961A1 INTEGRATED CIRCUIT LAYOUT DESIGN Public/Granted day:2010-07-22
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