Invention Grant
US07862980B2 Salt suitable for an acid generator and a chemically amplified positive resist composition containing the same
有权
适用于酸产生剂的盐和含有它的化学放大型正性抗蚀剂组合物
- Patent Title: Salt suitable for an acid generator and a chemically amplified positive resist composition containing the same
- Patent Title (中): 适用于酸产生剂的盐和含有它的化学放大型正性抗蚀剂组合物
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Application No.: US11882084Application Date: 2007-07-30
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Publication No.: US07862980B2Publication Date: 2011-01-04
- Inventor: Yukako Harada , Isao Yoshida , Yoshiyuki Takata
- Applicant: Yukako Harada , Isao Yoshida , Yoshiyuki Takata
- Applicant Address: JP Tokyo
- Assignee: Sumitomo Chemical Company, Limited
- Current Assignee: Sumitomo Chemical Company, Limited
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2006-210688 20060802
- Main IPC: G03F7/004
- IPC: G03F7/004 ; C07C309/12 ; C07D307/30
Abstract:
The present invention provides a salt represented by the formula (I): wherein P1, P2, P3, Q1, Q2 and R are defined in the specification and the present invention further provides a chemically amplified resist composition comprising the salt represented by the above-mentioned formula (I).
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