Invention Grant
- Patent Title: Methods of reducing CD loss in a microelectromechanical device
- Patent Title (中): 减少微机电设备中CD损耗的方法
-
Application No.: US12026131Application Date: 2008-02-05
-
Publication No.: US07863079B2Publication Date: 2011-01-04
- Inventor: Manish Kothari , Clarence Chui , Sauri Gudlavalleti
- Applicant: Manish Kothari , Clarence Chui , Sauri Gudlavalleti
- Applicant Address: US CA San Diego
- Assignee: Qualcomm MEMS Technologies, Inc.
- Current Assignee: Qualcomm MEMS Technologies, Inc.
- Current Assignee Address: US CA San Diego
- Agency: Knobbe Martens Olson & Bear LLP
- Main IPC: H01L21/00
- IPC: H01L21/00
Abstract:
Methods of fabricating an electromechanical systems device that minimize critical dimension (CD) loss in the device are described. The methods provide electromechanical systems devices with improved properties, including high reflectivity.
Public/Granted literature
- US20090195856A1 METHODS OF REDUCING CD LOSS IN A MICROELECTROMECHANICAL DEVICE Public/Granted day:2009-08-06
Information query
IPC分类:
