Invention Grant
US07863106B2 Silicon interposer testing for three dimensional chip stack 有权
硅插入式测试三维芯片堆栈

Silicon interposer testing for three dimensional chip stack
Abstract:
A testing method for a silicon interposer employs a test probe and an electrically conductive glass handler. The silicon interposer includes multiple interconnects that extend between the opposed major surfaces of the interposer, namely from a test side of the interposer to a conductive glass handler side of the interposer. On the glass handler side, the interposer includes a layer of patterned insulative resist with open regions at some interconnects on the glass handler side and remaining resist regions at other interconnects on the glass handler side. The interposer may include a conductive adhesive layer that couples together interconnects at the open regions on the glass handler side. In this manner, a probe may send a test signal from a first interconnect at one location on the test side of the interposer, through the first interconnect, through the conductive adhesive, through a second interconnect to another probe on the test side of the interposer. The method thus provides same-sided probe testing of the interposer. The method also provides for loading or power application to the conductive glass handler and testing of circuits and interconnects on the test side of the silicon interposer.
Public/Granted literature
Information query
Patent Agency Ranking
0/0