Invention Grant
- Patent Title: Transistor for active matrix display and a method for producing said transistor
- Patent Title (中): 用于有源矩阵显示的晶体管及其制造方法
-
Application No.: US10544787Application Date: 2004-02-06
-
Publication No.: US07863113B2Publication Date: 2011-01-04
- Inventor: Pere Roca I Cabarrocas , Régis Vanderhaghen , Bernard Drevillon
- Applicant: Pere Roca I Cabarrocas , Régis Vanderhaghen , Bernard Drevillon
- Applicant Address: FR Paris FR Palaiseau
- Assignee: Centre National de la Recherche Scientifique,Ecole Polytechnique
- Current Assignee: Centre National de la Recherche Scientifique,Ecole Polytechnique
- Current Assignee Address: FR Paris FR Palaiseau
- Agency: Young & Thompson
- Priority: EP03290304 20030206
- International Application: PCT/EP2004/001107 WO 20040206
- International Announcement: WO2004/070848 WO 20040819
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A transistor for active matrix display and a method for producing the transistor (1). The transistor (1) includes a microcrystalline silicon film (5) and an insulator (3). The crystalline fraction of the microcrystalline silicon film (5) is above 80%. According to the invention, the transistor (1) includes a plasma treated interface (4) located between the insulator (3) and the microcrystalline silicon film (5) so that the transistor (1) has a linear mobility equal or superior to 1.5 cm2V−1s−1, shows threshold voltage stability and wherein the microcrystalline silicon film (5) includes grains (6) whose size ranges between 10 nm and 400 nm. The invention concerns as well a display unit having a line-column matrix of pixels that are actively addressed, each pixel comprising at least a transistor as described above.
Public/Granted literature
- US20060240602A1 Transistor for active matrix display and a method for producing said transistor Public/Granted day:2006-10-26
Information query
IPC分类: