Invention Grant
- Patent Title: Semiconductor device having conductive bumps, metallic layers, covering layers and fabrication method thereof
- Patent Title (中): 具有导电凸块,金属层,覆盖层的半导体器件及其制造方法
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Application No.: US12005483Application Date: 2007-12-26
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Publication No.: US07863740B2Publication Date: 2011-01-04
- Inventor: Chun-Chi Ke , Chien-Ping Huang
- Applicant: Chun-Chi Ke , Chien-Ping Huang
- Applicant Address: TW Taichung
- Assignee: Siliconware Precision Industries Co., Ltd.
- Current Assignee: Siliconware Precision Industries Co., Ltd.
- Current Assignee Address: TW Taichung
- Agency: Edwards Angell Palmer & Dodge LLP
- Agent Peter F. Corless; Steven M. Jensen
- Priority: TW95149156A 20061227
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/52 ; H01L29/40

Abstract:
A semiconductor device having conductive bumps and a fabrication method thereof is proposed. The fabrication method includes the steps of forming a first metallic layer on a substrate having solder pads and a passivation layer formed thereon, and electrically connecting it to the solder pads; applying a second covering layer over exposed parts of the first metallic layer; subsequently, forming a second metallic layer on the second covering layer, and electrically connecting it to the exposed parts of the first metallic layer; applying a third covering layer, and forming openings for exposing parts of the second metallic layer to form thereon a conductive bump having a metallic standoff and a solder material. The covering layers and the metallic layers can provide a buffering effect for effectively absorbing the thermal stress imposed on the conductive bumps to prevent delamination caused by the UBM layers.
Public/Granted literature
- US20080211093A1 Semiconductor device having conductive bumps and fabrication method thereof Public/Granted day:2008-09-04
Information query
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