Invention Grant
US07863740B2 Semiconductor device having conductive bumps, metallic layers, covering layers and fabrication method thereof 有权
具有导电凸块,金属层,覆盖层的半导体器件及其制造方法

Semiconductor device having conductive bumps, metallic layers, covering layers and fabrication method thereof
Abstract:
A semiconductor device having conductive bumps and a fabrication method thereof is proposed. The fabrication method includes the steps of forming a first metallic layer on a substrate having solder pads and a passivation layer formed thereon, and electrically connecting it to the solder pads; applying a second covering layer over exposed parts of the first metallic layer; subsequently, forming a second metallic layer on the second covering layer, and electrically connecting it to the exposed parts of the first metallic layer; applying a third covering layer, and forming openings for exposing parts of the second metallic layer to form thereon a conductive bump having a metallic standoff and a solder material. The covering layers and the metallic layers can provide a buffering effect for effectively absorbing the thermal stress imposed on the conductive bumps to prevent delamination caused by the UBM layers.
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