Invention Grant
US07863915B2 Probe card cooling assembly with direct cooling of active electronic components 失效
探针卡冷却组件,直接冷却有源电子部件

Probe card cooling assembly with direct cooling of active electronic components
Abstract:
A probe card cooling assembly for use in a test system includes a package with one or more dies cooled by direct cooling. The cooled package includes one or more dies with active electronic components and at least one coolant port that allows a coolant to enter the high-density package and directly cool the active electronic components of the dies during a testing operation.
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