Invention Grant
- Patent Title: Probe card cooling assembly with direct cooling of active electronic components
- Patent Title (中): 探针卡冷却组件,直接冷却有源电子部件
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Application No.: US12547260Application Date: 2009-08-25
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Publication No.: US07863915B2Publication Date: 2011-01-04
- Inventor: Charles A. Miller
- Applicant: Charles A. Miller
- Applicant Address: US CA Livermore
- Assignee: FormFactor, Inc.
- Current Assignee: FormFactor, Inc.
- Current Assignee Address: US CA Livermore
- Agency: Kirton & McConkie
- Main IPC: G01R31/02
- IPC: G01R31/02

Abstract:
A probe card cooling assembly for use in a test system includes a package with one or more dies cooled by direct cooling. The cooled package includes one or more dies with active electronic components and at least one coolant port that allows a coolant to enter the high-density package and directly cool the active electronic components of the dies during a testing operation.
Public/Granted literature
- US20100052714A1 PROBE CARD COOLING ASSEMBLY WITH DIRECT COOLING OF ACTIVE ELECTRONIC COMPONENTS Public/Granted day:2010-03-04
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