Invention Grant
US07863925B2 Test circuit, wafer, measuring apparatus, and measuring method 有权
测试电路,晶圆,测量仪器和测量方法

Test circuit, wafer, measuring apparatus, and measuring method
Abstract:
There is provided a wafer on which a plurality of electronic devices and circuits under test are to be formed, where each circuit under test includes a plurality of transistors under measurement provided in electrically parallel, a selecting section which sequentially selects the respective transistors under measurement, and an output section which sequentially outputs the source voltages of the transistors under measurement sequentially selected by the selecting section.
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