Invention Grant
- Patent Title: Tune range limiter
- Patent Title (中): 调谐范围限制器
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Application No.: US12236716Application Date: 2008-09-24
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Publication No.: US07863996B2Publication Date: 2011-01-04
- Inventor: Daniel H. Cotter , Sean O. Harnett
- Applicant: Daniel H. Cotter , Sean O. Harnett
- Applicant Address: US MA Wilmington
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Wilmington
- Agency: Harness, Dickey & Pierce, P.L.C.
- Main IPC: H03H7/38
- IPC: H03H7/38

Abstract:
An impedance matching network includes a first input port that receives radio frequency (RF) power and includes an input impedance, an output port that provides the RF power and includes an output impedance, and a variable capacitance module that varies the output impedance. The variable capacitance module includes a first variable capacitor, a second variable capacitor, a first motor, and a second motor that adjusts a capacitance of the second variable capacitor. A relationship between a desired value of the capacitance and an actual value of the capacitance is dependent on a capacitance of the first variable capacitor.
Public/Granted literature
- US20100073104A1 Tune Range Limiter Public/Granted day:2010-03-25
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