Invention Grant
- Patent Title: MEMS plate switch and method of manufacture
- Patent Title (中): MEMS板式开关及其制造方法
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Application No.: US12068586Application Date: 2008-02-08
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Publication No.: US07864006B2Publication Date: 2011-01-04
- Inventor: John S. Foster , Paulo Silveira da Motta , Alok Paranjpye , Kimon Rybnicek
- Applicant: John S. Foster , Paulo Silveira da Motta , Alok Paranjpye , Kimon Rybnicek
- Applicant Address: US CA Goleta
- Assignee: Innovative Micro Technology
- Current Assignee: Innovative Micro Technology
- Current Assignee Address: US CA Goleta
- Agent Jaquelin K. Spong
- Main IPC: H01H51/22
- IPC: H01H51/22

Abstract:
Systems and methods for forming an electrostatic MEMS plate switch include forming a deformable plate on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. The deformable plate may have a flexible shunt bar which has one end coupled to the deformable plate, and the other end coupled to a contact on the second substrate. Upon activating the switch, the deformable plate urges the shunt bar against a second contact formed in the second substrate, thereby closing the switch. The hermetic seal may be a gold/indium alloy, formed by heating a layer of indium plated over a layer of gold. Electrical access to the electrostatic MEMS switch may be made by forming vias through the thickness of the second substrate.
Public/Granted literature
- US20080277258A1 MEMS plate switch and method of manufacture Public/Granted day:2008-11-13
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