Invention Grant
- Patent Title: Light blocking device and exposure apparatus
- Patent Title (中): 遮光装置和曝光装置
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Application No.: US11747016Application Date: 2007-05-10
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Publication No.: US07864297B2Publication Date: 2011-01-04
- Inventor: Nobuto Kawahara
- Applicant: Nobuto Kawahara
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2006-137684 20060517; JP2007-124689 20070509
- Main IPC: G03B27/54
- IPC: G03B27/54

Abstract:
A light blocking device includes a deformable member deformable in a first direction and elongating in a second direction intersecting with the first direction, a plurality of light blocking plates arrayed along the second direction, each of the plurality of light blocking plates being connected to the deformable member, so that adjoining blocking plates of the plurality of light blocking plates partly overlap with each other, and a plurality of actuators arrayed along the second direction and which cause deformation of the deformable member. At least one of the plurality of light blocking plates is tiltable independently from the other light blocking plates in response to deformation of the deformable member. A light blocking region is thereby defined, based on edges of the plurality of light blocking plates.
Public/Granted literature
- US20070268473A1 LIGHT BLOCKING DEVICE AND EXPOSURE APPARATUS Public/Granted day:2007-11-22
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