Invention Grant
- Patent Title: Compact Littrow encoder
- Patent Title (中): 紧凑型Littrow编码器
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Application No.: US12111081Application Date: 2008-04-28
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Publication No.: US07864336B2Publication Date: 2011-01-04
- Inventor: James Prince
- Applicant: James Prince
- Applicant Address: US CA Santa Clara
- Assignee: Agilent Technologies, Inc.
- Current Assignee: Agilent Technologies, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: G01B11/02
- IPC: G01B11/02

Abstract:
A Littrow encoder is disclosed. The encoder includes first and second interferometers and a beam splitter assembly that splits a first instrument light beam into first and second interferometer input beams and directs these beams into the first and second interferometers, respectively. Each interferometer generates a measurement beam and a reference beam and directs the measurement beam toward a grating on a surface from which the measurement beam is diffracted, the measurement beam from the first interferometer striking the surface at a Littrow angle that is the negative of the angle at which the measurement beam from the second interferometers strikes that surface. Each interferometer includes at least one intensity detector that generates a signal related to an intensity of light in a combined light beam that includes the reference and measurement beams from that interferometer.
Public/Granted literature
- US20090268210A1 Compact Littrow Encoder Public/Granted day:2009-10-29
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