Invention Grant
US07864338B2 Interferometric method and apparatus for linear detection of motion from a surface 有权
用于线性检测表面运动的干涉测量方法和装置

Interferometric method and apparatus for linear detection of motion from a surface
Abstract:
An apparatus and a method for detecting surface motion of an object subject to ultrasound are disclosed. The method comprises generating a laser beam, dividing the laser beam into a reference beam and an object beam to be directed onto the surface, thereby producing a scattered object beam, introducing a frequency shift between the reference beam and the scattered object beam, wherein the frequency shift is smaller than the ultrasonic frequency, detecting the interference between the scattered object beam and the frequency shifted reference beam using a plurality of detecting elements to generate a plurality of electrical interference signals, wherein the electrical interference signals each comprise a wanted signal component indicative of the surface motion and a noise signal component, and processing the electrical interference signals to determine the surface motion of the object.
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