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US07864403B2 Post-release adjustment of interferometric modulator reflectivity 有权
干涉式调制器反射率的释放后调整

Post-release adjustment of interferometric modulator reflectivity
Abstract:
In various embodiments, devices, methods, and systems for adjusting the reflectivity spectrum of a microelectromechanical systems (MEMS) device are described herein. The method comprises depositing a reflectivity modifying layer with the optical cavity of an interferometric modulator, where the reflectivity modifying layer shifts or trims the shape of the interferometric modulator's wavelength reflectivity spectrum relative to the absence of the reflectivity modifying layer.
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