Invention Grant
- Patent Title: Examination apparatus with multiple image acquisition devices
- Patent Title (中): 具有多个图像采集装置的检查装置
-
Application No.: US11840449Application Date: 2007-08-17
-
Publication No.: US07864413B2Publication Date: 2011-01-04
- Inventor: Yoshihisa Tanikawa , Tomoaki Sato , Ikuko Sakai
- Applicant: Yoshihisa Tanikawa , Tomoaki Sato , Ikuko Sakai
- Applicant Address: JP Tokyo
- Assignee: Olympus Corporation
- Current Assignee: Olympus Corporation
- Current Assignee Address: JP Tokyo
- Agency: Pillsbury Winthrop Shaw Pittman, LLP
- Priority: JP2006-229722 20060825
- Main IPC: G02B21/36
- IPC: G02B21/36

Abstract:
An examination apparatus that observes a specimen in a stationary state while suppressing the blurring caused by a control delay. The apparatus includes a first optical system and a second optical system for imaging light produced in a specimen, a first image-acquisition unit with a plurality of first image-acquisition devices for detecting an image formed by the first optical system, a second image-acquisition unit with a second image-acquisition device for acquiring an image formed by the second optical system, and a driving unit that causes the images to be formed at the same position in the second image-acquisition unit. The value obtained by dividing the pixel size Y of the first image-acquisition devices by the magnification X of the first optical system is smaller than the value obtained by dividing the pixel size Y′ of the second image-acquisition device by the magnification X′ of the second optical system.
Public/Granted literature
- US20080049309A1 EXAMINATION APPARATUS Public/Granted day:2008-02-28
Information query