Invention Grant
- Patent Title: Outer surface-inspecting method and outer surface-inspecting apparatus
- Patent Title (中): 外表检查方法和外表面检查装置
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Application No.: US11302149Application Date: 2005-12-14
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Publication No.: US07865011B2Publication Date: 2011-01-04
- Inventor: Shigeyuki Akimoto
- Applicant: Shigeyuki Akimoto
- Applicant Address: JP Itabashi-ku, Tokyo
- Assignee: Kabushiki Kaisha TOPCON
- Current Assignee: Kabushiki Kaisha TOPCON
- Current Assignee Address: JP Itabashi-ku, Tokyo
- Agency: Buchanan Ingersoll & Rooney PC
- Priority: JP2004-366934 20041220
- Main IPC: G06K9/00
- IPC: G06K9/00 ; B07C5/00

Abstract:
A outer surface-inspecting method for judging whether a defect of a defective portion (27) extracted from an inspection area in an image (21A) of an object through comparison with a template is acceptable or not, comprising: dividing the inspection area into a plurality of sections (22, 23, 24a, 24b, 25a, 25b, 28a, 28b, 28c) respectively having different acceptable levels (CONDITION 1-5); preliminarily judging, when at least one extracted defective portion (27) spreads out over some of the sections (28a, 28b, 28c) respectively having different acceptable levels (CONDITION 3-5), whether defects of parts (27a, 27b, 27c) of the defective portion (27), each part (27a, 27b, 27c) being located on a different section (28a, 28b, 28c), are acceptable or not on a part to part basis according to the acceptable levels (CONDITION 3-5) of the sections (28a, 28b, 28c) on which the parts (27a, 27b, 27c) of the defective portion (27) are respectively located; and judging whether the defect of the defective portion (27) is acceptable or not based on the result of the preliminary judgment.
Public/Granted literature
- US20060182334A1 Outer surface-inspecting method and outer surface-inspecting apparatus Public/Granted day:2006-08-17
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