Invention Grant
US07865011B2 Outer surface-inspecting method and outer surface-inspecting apparatus 失效
外表检查方法和外表面检查装置

Outer surface-inspecting method and outer surface-inspecting apparatus
Abstract:
A outer surface-inspecting method for judging whether a defect of a defective portion (27) extracted from an inspection area in an image (21A) of an object through comparison with a template is acceptable or not, comprising: dividing the inspection area into a plurality of sections (22, 23, 24a, 24b, 25a, 25b, 28a, 28b, 28c) respectively having different acceptable levels (CONDITION 1-5); preliminarily judging, when at least one extracted defective portion (27) spreads out over some of the sections (28a, 28b, 28c) respectively having different acceptable levels (CONDITION 3-5), whether defects of parts (27a, 27b, 27c) of the defective portion (27), each part (27a, 27b, 27c) being located on a different section (28a, 28b, 28c), are acceptable or not on a part to part basis according to the acceptable levels (CONDITION 3-5) of the sections (28a, 28b, 28c) on which the parts (27a, 27b, 27c) of the defective portion (27) are respectively located; and judging whether the defect of the defective portion (27) is acceptable or not based on the result of the preliminary judgment.
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