Invention Grant
US07865328B2 Position detecting method and apparatus 有权
位置检测方法和装置

Position detecting method and apparatus
Abstract:
A position detecting method includes the steps of forming an image of a mark on a sensor, performing a first process that processes a raw signal obtained from the sensor with plural parameters, performing a second process that determines an edge of a signal processed by the first process for each parameter, determining a parameter from a result of the second process obtained for each parameter, and calculating a position of the mark based on a determined parameter.
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