Invention Grant
- Patent Title: Method and apparatus of automatic scanning probe imaging
- Patent Title (中): 自动扫描探针成像的方法和装置
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Application No.: US12210075Application Date: 2008-09-12
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Publication No.: US07865966B2Publication Date: 2011-01-04
- Inventor: Chanmin Su , Sergey Belikov
- Applicant: Chanmin Su , Sergey Belikov
- Applicant Address: US CA Santa Barbara
- Assignee: Veeco Metrology Inc.
- Current Assignee: Veeco Metrology Inc.
- Current Assignee Address: US CA Santa Barbara
- Agency: Boyle Fredrickson S.C.
- Main IPC: G01Q10/06
- IPC: G01Q10/06 ; G01Q30/04 ; G01Q30/06

Abstract:
A method of operating a scanning probe microscope (SPM) includes scanning a sample as a probe of the SPM interacts with a sample, and collecting sample surface data in response to the scanning step. The method identifies a feature of the sample from the sample surface data and automatically performs a zoom-in scan of the feature based on the identifying step. The method operates to quickly identify and confirm the location of features of interest, such as nano-asperities, so as to facilitate performing a directed high resolution image of the feature.
Public/Granted literature
- US20090077697A1 METHOD AND APPARATUS OF AUTOMATIC SCANNING PROBE IMAGING Public/Granted day:2009-03-19
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