Invention Grant
- Patent Title: Sample operation apparatus
- Patent Title (中): 样品操作装置
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Application No.: US11932222Application Date: 2007-10-31
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Publication No.: US07866205B2Publication Date: 2011-01-11
- Inventor: Masatoshi Yasutake , Takeshi Umemoto
- Applicant: Masatoshi Yasutake , Takeshi Umemoto
- Applicant Address: JP Chiba-shi, Chiba
- Assignee: SII Nano Technology Inc.
- Current Assignee: SII Nano Technology Inc.
- Current Assignee Address: JP Chiba-shi, Chiba
- Agency: Brinks Hofer Gilson & Lione
- Priority: JP2006-295213 20061031
- Main IPC: G01B5/28
- IPC: G01B5/28

Abstract:
There is provided a sample operation apparatus in which, by a static electricity force acting between a probe and a sample, an accurate position is gripped without the sample being moved, and the sample can be operated by the probe for an observation, a grip, a release, or the like. In a casing body capable of being sealed, there are installed a sample operation tweezers comprising an observation probe and a grip probe, and a sample base fixing a substrate on which the sample is mounted. By the facts that a surface of the substrate is treated such that its hydrophilic nature is higher than the sample operation tweezers, and that a humidity in the casing body is controlled by a humidity control device, there is made such that an actuation of a grip, a movement, a separation or the like of the sample is performed under a state in which water films are formed on the sample, the substrate and a surface of the sample operation tweezers.
Public/Granted literature
- US20080105044A1 SAMPLE OPERATION APPARATUS Public/Granted day:2008-05-08
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