Invention Grant
- Patent Title: Chemically inert flow controller with non-contaminating body
- Patent Title (中): 具有非污染物的化学惰性流量控制器
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Application No.: US11482542Application Date: 2006-07-07
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Publication No.: US07866337B2Publication Date: 2011-01-11
- Inventor: Robert T. Chinnock , Clifford Miller , Charles Meacham
- Applicant: Robert T. Chinnock , Clifford Miller , Charles Meacham
- Applicant Address: US MA Billerica
- Assignee: Entegris, Inc.
- Current Assignee: Entegris, Inc.
- Current Assignee Address: US MA Billerica
- Agency: Patterson Thuente Christensen Pedersen, P.A.
- Main IPC: F16K31/02
- IPC: F16K31/02

Abstract:
A flow controller including a unitary controller body with a chemically inert fluid conduit having an insertable constriction or orifice disposed within the conduit having a reduced cross-sectional area to thereby restrict the flow of fluid within the conduit allowing for reliable flow measurement. An integrated circuit or controller may be coupled to the control valve and also coupled to the pressure sensors by a lead structure including signal conductors surrounded by a Faraday cage, and a chemically inert housing coupled to the unitary controller body enclosing the control valve and the pressure sensors.
Public/Granted literature
- US20070089788A1 Chemically inert flow controller with non-contaminating body Public/Granted day:2007-04-26
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