Invention Grant
US07866341B2 Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same
有权
真空泵送系统，其驱动方法，具有该真空泵系统的装置，以及使用其的基板的转移方法
- Patent Title: Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same
- Patent Title (中): 真空泵送系统，其驱动方法，具有该真空泵系统的装置，以及使用其的基板的转移方法
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Application No.: US12713136Application Date: 2010-02-25
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Publication No.: US07866341B2Publication Date: 2011-01-11
- Inventor: Hong-Seub Kim , Hyun-Soo Park , Soon-Bin Jung , Sung-Ho Cha , Dong-Jin Kim , Wook-Jung Hwang , Jin-Hyuk Yoo
- Applicant: Hong-Seub Kim , Hyun-Soo Park , Soon-Bin Jung , Sung-Ho Cha , Dong-Jin Kim , Wook-Jung Hwang , Jin-Hyuk Yoo
- Applicant Address: KR Gwangju-si, Gyeonggi-do
- Assignee: Jusung Engineering Co., Ltd.
- Current Assignee: Jusung Engineering Co., Ltd.
- Current Assignee Address: KR Gwangju-si, Gyeonggi-do
- Agency: Portland IP Law, LLC
- Priority: KR2004-0015544 20040308; KR2004-0017627 20040316; KR2004-0017832 20040317; KR2005-0014819 20050223
- Main IPC: H01L21/205
- IPC: H01L21/205
Abstract:
An apparatus includes a transfer unit under an atmospheric condition and having a robot therein; and at least one process chamber connected to one side of the transfer unit with a slot valve there between, and being alternately under a vacuum condition and under an atmospheric condition.
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