Invention Grant
- Patent Title: Method and apparatus for forming planar alloy deposits on a substrate
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Application No.: US12181852Application Date: 2008-07-29
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Publication No.: US07867842B2Publication Date: 2011-01-11
- Inventor: Peter Alfred Gruber , Paul Alfred Lauro , Jae-Woong Nah
- Applicant: Peter Alfred Gruber , Paul Alfred Lauro , Jae-Woong Nah
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Ryan, Mason & Lewis, LLP
- Agent Daniel P. Morris
- Main IPC: H01L21/8242
- IPC: H01L21/8242

Abstract:
A method for forming alloy deposits at selected areas on a receiving substrate includes the steps of: providing an alloy carrier including at least a first decal including a first plurality of openings and a second decal including a second plurality of openings, the first and second decals being arranged such that each of the first plurality of openings is in alignment with a corresponding one of the second plurality of openings; filling the first and second plurality of openings with molten alloy; cooling the molten alloy to thereby form at least first and second plugs, the first plug having a first surface and a second surface substantially parallel to one another, the second plug having a third surface and a fourth surface substantially parallel to one another; removing at least one of the first and second decals to at least partially expose the first and second plugs; aligning the alloy carrier with the receiving substrate so that the first and second plugs correspond to the selected areas on the receiving substrate; and transferring the first plug to a first of the selected areas and the second plug to a second of the selected areas.
Public/Granted literature
- US20100028612A1 Method and Apparatus for Forming Planar Alloy Deposits on a Substrate Public/Granted day:2010-02-04
Information query
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