Invention Grant
- Patent Title: Gate structures for flash memory and methods of making same
- Patent Title (中): 闪存的门结构及其制作方法
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Application No.: US11615321Application Date: 2006-12-22
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Publication No.: US07867843B2Publication Date: 2011-01-11
- Inventor: Ramakanth Alapati , Ardavan Niroomand
- Applicant: Ramakanth Alapati , Ardavan Niroomand
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agent John N. Greaves
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A process may include forming a polysilicon pinnacle above and on a polysilicon island and further forming a floating gate from the polysilicon pinnacle and polysilicon island. The floating gate can bear an inverted T-shape. The floating gate can also be disposed above an isolated semiconductive substrate such as in a shallow-trench isolation semiconductive substrate. Electronic devices may include the floating gate as part of a field effect transistor.
Public/Granted literature
- US20080149987A1 GATE STRUCTURES FOR FLASH MEMORY AND METHODS OF MAKING SAME Public/Granted day:2008-06-26
Information query
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