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US07867843B2 Gate structures for flash memory and methods of making same 有权
闪存的门结构及其制作方法

Gate structures for flash memory and methods of making same
Abstract:
A process may include forming a polysilicon pinnacle above and on a polysilicon island and further forming a floating gate from the polysilicon pinnacle and polysilicon island. The floating gate can bear an inverted T-shape. The floating gate can also be disposed above an isolated semiconductive substrate such as in a shallow-trench isolation semiconductive substrate. Electronic devices may include the floating gate as part of a field effect transistor.
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