Invention Grant
- Patent Title: Methods for fabricating dual bit flash memory devices
- Patent Title (中): 制造双位闪存器件的方法
-
Application No.: US12765646Application Date: 2010-04-22
-
Publication No.: US07867848B2Publication Date: 2011-01-11
- Inventor: Minghao Shen , Fred Cheung , Ning Cheung , Wei Zheng , Hiroyuki Kinoshita , Chih-Yuh Yang
- Applicant: Minghao Shen , Fred Cheung , Ning Cheung , Wei Zheng , Hiroyuki Kinoshita , Chih-Yuh Yang
- Applicant Address: US CA Sunnyvale
- Assignee: Spansion, LLC
- Current Assignee: Spansion, LLC
- Current Assignee Address: US CA Sunnyvale
- Main IPC: H01L21/8239
- IPC: H01L21/8239

Abstract:
Methods for fabricating dual bit memory devices are provided. In an exemplary embodiment of the invention, a method for fabricating a dual bit memory device comprises forming a charge trapping layer overlying a substrate and etching an isolation opening through the charge trapping layer. An oxide layer is formed overlying the charge trapping layer and within the isolation opening. A control gate is fabricated overlying the isolation opening and portions of the charge trapping layer adjacent to the isolation opening. The oxide layer and the charge trapping layer are etched using the control gate as an etch mask and impurity dopants are implanted into the substrate using the control gate as an implantation mask.
Public/Granted literature
- US20100203694A1 METHODS FOR FABRICATING DUAL BIT FLASH MEMORY DEVICES Public/Granted day:2010-08-12
Information query
IPC分类: