Invention Grant
US07867899B2 Wordline resistance reduction method and structure in an integrated circuit memory device 有权
集成电路存储器件中的字线电阻降低方​​法和结构

Wordline resistance reduction method and structure in an integrated circuit memory device
Abstract:
Methods and structures for reducing resistance in wordlines of an integrated circuit memory device are disclosed. In one embodiment, the method includes forming multiple columns of polycrystalline silicon for respective number of wordlines, forming core transistor junctions and periphery transistor junctions associated with the wordlines, performing a salicidation process for the periphery transistor junction and performing a salicidation process for the columns of polycrystalline silicon to from the wordlines with low resistance.
Information query
Patent Agency Ranking
0/0