Invention Grant
- Patent Title: Polishing composition and polishing method
- Patent Title (中): 抛光组合物和抛光方法
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Application No.: US11844014Application Date: 2007-08-23
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Publication No.: US07867909B2Publication Date: 2011-01-11
- Inventor: Yasuhide Uemura
- Applicant: Yasuhide Uemura
- Applicant Address: JP Kiyosu-shi, Aichi
- Assignee: Fujimi Incorporated
- Current Assignee: Fujimi Incorporated
- Current Assignee Address: JP Kiyosu-shi, Aichi
- Agency: Vidas, Arrett & Steinkraus, P.A.
- Priority: JP2006-227614 20060824
- Main IPC: H01L21/461
- IPC: H01L21/461 ; B24B1/00 ; C09K3/14

Abstract:
A polishing composition contains at least one water soluble polymer selected from the group consisting of polyvinylpyrrolidone and poly(N-vinylformamide), and an alkali, and preferably further contains at least one of a chelating agent and an abrasive grain. The water soluble polymer preferably has a weight average molecular weight of 6,000 to 4,000,000. The polishing composition is mainly used in polishing of the surfaces of semiconductor wafers such as silicon wafers, especially used in preliminary polishing of the surfaces of such wafers.
Public/Granted literature
- US20080051010A1 Polishing Composition and Polishing Method Public/Granted day:2008-02-28
Information query
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