Disclosed is a method for forming an antiwear film on an internal engine component comprising: contacting a surface of an internal wearing component of the engine with a tetra-functional hydrolyzable silane compound of the general formula Si—X4 or hydrolysis product thereof, wherein X is independently selected from the group consisting of hydroxyl, alkoxy, aryloxy, acyloxy, amino, monoalkyl amino and dialkyl amino; and hydrolyzing and condensing the tetra-functional silane to thereby form a film. Also disclosed are mixed silane films and the products produced by these methods.