Invention Grant
US07868298B2 Radiation sensor element, method for producing a radiation sensor element and sensor field
有权
辐射传感器元件，辐射传感器元件和传感器场的制造方法
- Patent Title: Radiation sensor element, method for producing a radiation sensor element and sensor field
- Patent Title (中): 辐射传感器元件，辐射传感器元件和传感器场的制造方法
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Application No.: US12070609Application Date: 2008-02-19
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Publication No.: US07868298B2Publication Date: 2011-01-11
- Inventor: Ando Feyh
- Applicant: Ando Feyh
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102007008381 20070221
- Main IPC: G01T1/24
- IPC: G01T1/24 ; H01L21/00
Abstract:
A radiation sensor element and a method for producing it, as well as a sensor field having a plurality of such radiation sensor elements, the radiation sensor element having a substrate and a planar sensor structure disposed above the substrate in a first plane, and a lead structure being disposed in a second plane between the substrate and the sensor structure.
Public/Granted literature
- US20080265168A1 Radiation sensor element, method for producing a radiation sensor element and sensor field Public/Granted day:2008-10-30
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